Product Introduction:

Product Name: Triphenylsulfonium perfluoro-1-butanesufonate
                (TPS-PFBS, TPS-Nf)

Molecular Formula: CF3(CF2)3SO3S(C6H5)3

Molecular Weight: 562.47

CAS Number: 144317-44-2

Physicochemical Properties:
White crystalline substance, content :> 99 %( electronic grade), m.p. 84-88°C
Solubility: PGMEA: ~50%, γ-butyrolactone: ~65%, ethyls lactate: ~65%.
The TPS-PFBS features high acid strength, good solubility in resins and solvents,
high purity, high thermal stability, and low volatility.

Application
surface acting agent(SAA), cationic photo initiator, photo acid generator(PAG), antireflective coating(ARC),as the replacement of perfluorooctyl sulfonate(PFOS) in 193-, 157- and 248-nm photoresist for it has a much better Environmental, Health, Safety and Regulatory (EHS&R) profile than PFOS.

Package & Storage & Transportation:500g×10 for plastic bottle and 500g for fresco bag with external solid paper box. Storage is in light of the regulations of general chemicals.